Surface nanoscale axial photonics: robust fabrication of high-quality-factor microresonators.

Recently introduced surface nanoscale axial photonics (SNAP) makes it possible to fabricate high-Q-factor microresonators and other photonic microdevices by dramatically small deformation of the optical fiber surface. To become a practical and robust technology, the SNAP platform requires methods enabling reproducible modification of the optical fiber radius at nanoscale. In this Letter, we demonstrate superaccurate fabrication of high-Q-factor microresonators by nanoscale modification of the optical fiber radius and refractive index using CO2 laser and UV excimer laser beam exposures. The achieved fabrication accuracy is better than 2 Å in variation of the effective fiber radius.